Course Description: The course serves as a comprehensive introduction to the use of scanning electron microscopy of materials science and engineering applications. The electron optics are first described, followed by detailed examination of electron beam solid interactions. The SEM techniques of secondary and backscattered electron imaging and x-ray microanalysis are covered in detail. More advanced techniques are introduced briefly, with emphasis on low voltage and semiconductor analysis; followed by STM and AFM as examples of scanned probe microscopy. Focused ion beam (FIB) will be presented with applications.

Course Objectives: This course is designed for the engineer or scientist who seeks to develop a fundamental working knowledge of scanning electron microscopy and related techniques: including the basic physical mechanisms, the instrumental aspects and applications to materials characterization.

Course Outline by Topical Areas:

Overview and History of SEM in Materials Science

Electron Optics: Electron guns, Electron lenses, Probe size vs. probe current

Electron beam specimen interactions: Scattering, Interaction Volume,

Monte Carlo simulations, Backscattered electrons, Inelastic scattering

Imaging Formation in the SEM: Basic imaging process, Detectors, Contrast

Formation, Image quality, Signal Processing

X-ray Spectral Measurement: EDS and WDS; Wavelength spectrometers;

Energy dispersive spectrometers; Comparisons

Qualitative X-ray Analysis: EDS, WDS, Mapping

Quantitative X-ray Microanalysis: ZAF technique, Empirical methods,

Non-normal electron beam, Thin film analysis

Recent SEM developments: Low voltage, Field emission, Automation

Materials Science Sample Preparation

Specialized Techniques: Metrology, Lithography, E-beam testing of IC's

Scanning Tunneling and Atomic Force Microscopy

Focused Ion Beam microscopy and micromachining

Course Requirements:

Homework: Generally one set per two to three weeks (20%)

Examinations: Midterm (25) and final exam (40%)

Computer Language: None

Computer Facilities: Access to WWW is required. A student version of Adobe Photoshop or equivalent is required for the course. Please check the VBEE Web site at www.vbee.ncsu.edu or contact the instructor for information on how to acquire a copy.

Laboratory: SEM lab experiments are described and suggested if equipment is available, but not required.

Project: Each student will prepare presentations of recent literature on an SEM related research topic (15%)

Note: Course lectures are available Online via streaming media or on CD-ROMS. If you wish to have the CD-ROM lectures sent to you, contact the NCSU administrative contact at Linda _ Krute@ncsu.edu. All students will be required to have Internet access to acquire the course materials and homeworks.

Notes:

Audit students should turn in homework or take exams.

Degree Applicability:

CE[AA]	CH[E]	CS[AA]	EE[BE]	EM[E]	ESM[NA]	MAT[BDE]
MBA[NA]	ME[BDE]	MES[E]	MSE[E]	SE[NA]	SY[AA]

Click here for further information on degree applicability.

NTU Semester Credit Hours: 3
Number of Lecture Hours: 40 (50 minute) lectures - CD-ROM and Online
Days Class Meets on Campus: Monday/Wednesday/Friday

Contributing Scholar:
Phillip Russell
Materials Science and Engineering
North Carolina State University
318 EGRC - Centennial Campus
Box 7531
Raleigh, NC   27695-7531
Phone: 919-515-7501

Fax: 919-515-6965
prussell@ncsu.edu

Note: Contributing Scholars are responsible for the design, organization, content, and presentation of NTU courses. Online classroom management, student management, and other matters related to academic administration of courses are the responsibility of support "Faculty". Either person is often called "Instructor". To identify and differentiate between these roles, we use the terms "Contributing Scholar" and "Faculty".

Academic/Administrative Contact:  
Dr. Linda D. Krute
Phone: 919-515-5440
Fax: 919-515-8415
Linda_Krute@ncsu.edu


Prerequisites: BS in engineering, physics or chemistry or consent of instructor.

Textbooks: (Order Materials)

1.	Scanning Electron Microscopy and X-ray Microanalysis, J. I. Goldstein et al., Plenum Press, 2nd edition Instructor's course notes are available on the VBEE Web Site at www.vbee.ncsu.edu.